Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films

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Translated title of the contribution	Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films
Original language	English
Pages (from-to)	403-409
Journal	Thin solid films
Volume	534
DOIs	https://doi.org/10.1016/j.tsf.2013.03.017
Publication status	Published - 2013

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@article{43259137a4d447cfb76dc34c63c6ba37,

title = "Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films",

author = "Christian Tritremmel and Rostislav Daniel and M Lechthaler and P Pocik and Christian Mitterer",

year = "2013",

doi = "10.1016/j.tsf.2013.03.017",

language = "English",

volume = "534",

pages = "403--409",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films

AU - Tritremmel, Christian

AU - Daniel, Rostislav

AU - Lechthaler, M

AU - Pocik, P

AU - Mitterer, Christian

PY - 2013

Y1 - 2013

U2 - 10.1016/j.tsf.2013.03.017

DO - 10.1016/j.tsf.2013.03.017

M3 - Article

SN - 0040-6090

VL - 534

SP - 403

EP - 409

JO - Thin solid films

JF - Thin solid films

ER -