Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution

Siegfried Zöhrer, André Anders, Robert Franz

Research output: Contribution to journalArticleResearchpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)0552011-05520114
JournalJournal of physics / D, Applied physics
Publication statusPublished - 2018

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