Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution

Siegfried Zöhrer; André Anders; Robert Franz

doi:10.1088/1361-6463/aaeecc

Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution

Siegfried Zöhrer
, André Anders
, Robert Franz

Chair of Functional Materials and Materials Systems (425)

Lawrence Berkeley National Laboratory
Leibniz-Institut für Oberflächenmodifizierung

Research output: Contribution to journal › Article › Research › peer-review

3 Citations (Scopus)

Original language	English
Pages (from-to)	0552011-05520114
Journal	Journal of physics / D, Applied physics
DOIs	https://doi.org/10.1088/1361-6463/aaeecc
Publication status	Published - 2018

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10.1088/1361-6463/aaeeccLicence: CC BY

Cite this

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title = "Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution",

author = "Siegfried Z{\"o}hrer and Andr{\'e} Anders and Robert Franz",

year = "2018",

doi = "10.1088/1361-6463/aaeecc",

language = "English",

pages = "0552011--05520114",

journal = "Journal of physics / D, Applied physics",

issn = "0022-3727",

publisher = "Institute of Physics",

}

TY - JOUR

T1 - Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution

AU - Zöhrer, Siegfried

AU - Anders, André

AU - Franz, Robert

PY - 2018

Y1 - 2018

U2 - 10.1088/1361-6463/aaeecc

DO - 10.1088/1361-6463/aaeecc

M3 - Article

SN - 0022-3727

SP - 552011

EP - 5520114

JO - Journal of physics / D, Applied physics

JF - Journal of physics / D, Applied physics

ER -