Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices

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Translated title of the contribution	Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices
Original language	English
Pages (from-to)	375-379
Journal	Thin solid films
Volume	545
DOIs	https://doi.org/10.1016/j.tsf.2013.07.026
Publication status	Published - 2013

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@article{b04d37a152544ed88e1eb65ed4305f09,

title = "Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices",

author = "Manfred Schl{\"o}gl and Bernhard Mayer and J. Paulitsch and P. Mayrhofer",

year = "2013",

doi = "10.1016/j.tsf.2013.07.026",

language = "English",

volume = "545",

pages = "375--379",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices

AU - Schlögl, Manfred

AU - Mayer, Bernhard

AU - Paulitsch, J.

AU - Mayrhofer, P.

PY - 2013

Y1 - 2013

U2 - 10.1016/j.tsf.2013.07.026

DO - 10.1016/j.tsf.2013.07.026

M3 - Article

SN - 0040-6090

VL - 545

SP - 375

EP - 379

JO - Thin solid films

JF - Thin solid films

ER -