Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings

Christian Saringer, Christoph Oberroither, Katrin Zorn, Robert Franz, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

3 Citations (Scopus)
Original languageEnglish
JournalJournal of vacuum science & technology / A (JVST)
Issue number2
Publication statusPublished - 2018

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