Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings

Christian Saringer, Christoph Oberroither, Katrin Zorn, Robert Franz, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

3 Citations (Scopus)

Original language	English
Journal	Journal of vacuum science & technology / A (JVST)
Volume	36
Issue number	2
DOIs	https://doi.org/10.1116/1.5001141
Publication status	Published - 2018

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title = "Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings",

author = "Christian Saringer and Christoph Oberroither and Katrin Zorn and Robert Franz and Christian Mitterer",

year = "2018",

doi = "10.1116/1.5001141",

language = "English",

volume = "36",

journal = "Journal of vacuum science & technology / A (JVST)",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings

AU - Saringer, Christian

AU - Oberroither, Christoph

AU - Zorn, Katrin

AU - Franz, Robert

AU - Mitterer, Christian

PY - 2018

Y1 - 2018

U2 - 10.1116/1.5001141

DO - 10.1116/1.5001141

M3 - Article

SN - 0734-2101

VL - 36

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

IS - 2

ER -