Influence of hydrogen sulfide addition on the alumina deposition by plasma CVD

M. Fink, J. Laimer, H. Störi, Christian Mitterer

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4 Citations (Scopus)
Translated title of the contributionInfluence of hydrogen sulfide addition on the alumina deposition by plasma CVD
Original languageEnglish
Pages (from-to)360-363
JournalSurface & coatings technology
Volume200
DOIs
Publication statusPublished - 2005

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