Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOx film growth

Robert Franz, César Clavero, André Anders, Jonathan Kolbeck

Research output: Contribution to journalArticleResearchpeer-review

24 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-11
Number of pages11
JournalPlasma sources science & technology
Publication statusPublished - 2016

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