Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT

Research output: Contribution to conference › Presentation › Research › peer-review

Original language	English
Publication status	Published - 2014
Event	nanoFIS Konferenz - Graz, Austria Duration: 3 Dec 2014 → 5 Dec 2014

NanoFIS
Mühlbacher, M. (Speaker)
3 Dec 2014
Activity: Participating in or organising an event › Participation in conference

Cite this

@conference{5d2d6934336148f085f623597d31950c,

title = "Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT",

author = "Marlene M{\"u}hlbacher and \{Mendez Martin\}, Francisca and B. Sartory and J. Lu and Nina Schalk and Hultman Lars and Christian Mitterer",

year = "2014",

language = "English",

note = "nanoFIS Konferenz ; Conference date: 03-12-2014 Through 05-12-2014",

}