Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films

Helmut Riedl, F. Munnik, H. Hutter, Francisca Mendez Martin, S. Kolozsvari, M. Bartosik, Paul Heinz Mayrhofer, Christian Koller, Richard Rachbauer

Research output: Contribution to journalArticleResearchpeer-review

19 Citations (Scopus)
Original languageEnglish
Pages (from-to)39-49
Number of pages10
JournalThin solid films
Publication statusPublished - 2016

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