Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films

Helmut Riedl; F. Munnik; H. Hutter; Francisca Mendez Martin; S. Kolozsvari; M. Bartosik; Paul Heinz Mayrhofer; Christian Koller; Richard Rachbauer

doi:10.1016/j.tsf.2016.01.039

Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films

Helmut Riedl
, F. Munnik
, H. Hutter
, Francisca Mendez Martin
, S. Kolozsvari
, M. Bartosik
, Paul Heinz Mayrhofer
, Christian Koller
, Richard Rachbauer

Chair of Physical Metallurgy (420)

Institute of Materials Science and Technology

Research output: Contribution to journal › Article › Research › peer-review

19 Citations (Scopus)

Original language	English
Pages (from-to)	39-49
Number of pages	10
Journal	Thin solid films
Volume	603
DOIs	https://doi.org/10.1016/j.tsf.2016.01.039
Publication status	Published - 2016

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10.1016/j.tsf.2016.01.039

Cite this

@article{2003215d71b845d3b5441744f6acef2e,

title = "Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films",

author = "Helmut Riedl and F. Munnik and H. Hutter and \{Mendez Martin\}, Francisca and S. Kolozsvari and M. Bartosik and Mayrhofer, \{Paul Heinz\} and Christian Koller and Richard Rachbauer",

year = "2016",

doi = "10.1016/j.tsf.2016.01.039",

language = "English",

volume = "603",

pages = "39--49",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films

AU - Riedl, Helmut

AU - Munnik, F.

AU - Hutter, H.

AU - Mendez Martin, Francisca

AU - Kolozsvari, S.

AU - Bartosik, M.

AU - Mayrhofer, Paul Heinz

AU - Koller, Christian

AU - Rachbauer, Richard

PY - 2016

Y1 - 2016

U2 - 10.1016/j.tsf.2016.01.039

DO - 10.1016/j.tsf.2016.01.039

M3 - Article

SN - 0040-6090

VL - 603

SP - 39

EP - 49

JO - Thin solid films

JF - Thin solid films

ER -