Influence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering

Stephan Grasser, Gert Gassner, Claudia Walter, Rostislav Daniel, Christian Mitterer

Research output: Contribution to conferencePosterResearchpeer-review

Translated title of the contributionInfluence of Pulsed Substrate Bias on the Structure and Properties of CrN Coatings Deposited by Reactive DC Magnetron Sputtering
Original languageEnglish
Publication statusPublished - 2006
EventJuniior Euromat 2006 - Lausanne, Switzerland
Duration: 4 Sept 20068 Sept 2006

Conference

ConferenceJuniior Euromat 2006
Country/TerritorySwitzerland
CityLausanne
Period4/09/068/09/06

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