Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings

Jörg Paulitsch, R. Rachbauer, J. Ramm, P. Polcik, P.H. Mayrhofer

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Translated title of the contribution	Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings
Original language	English
Pages (from-to)	29-32
Journal	Vacuum
Volume	100
DOIs	https://doi.org/10.1016/j.vacuum.2013.06.008
Publication status	Published - 2014

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title = "Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings",

author = "J{\"o}rg Paulitsch and R. Rachbauer and J. Ramm and P. Polcik and P.H. Mayrhofer",

year = "2014",

doi = "10.1016/j.vacuum.2013.06.008",

language = "English",

volume = "100",

pages = "29--32",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings

AU - Paulitsch, Jörg

AU - Rachbauer, R.

AU - Ramm, J.

AU - Polcik, P.

AU - Mayrhofer, P.H.

PY - 2014

Y1 - 2014

U2 - 10.1016/j.vacuum.2013.06.008

DO - 10.1016/j.vacuum.2013.06.008

M3 - Article

SN - 0042-207X

VL - 100

SP - 29

EP - 32

JO - Vacuum

JF - Vacuum

ER -