Influence of the N2 partial pressure on structure and properties of Zr1-xAlxN thin films

Doris Sonnleitner, Jörg Paulitsch, Peter Polcik, Paul Heinz Mayrhofer

Research output: Contribution to conference › Poster › Research › peer-review

Translated title of the contributionInfluence of the N2 partial pressure on structure and properties of Zr1-xAlxN thin films
Original languageEnglish
Publication statusPublished - 2012
EventPSE 2012 - Garmisch-Partenkirchen, Germany
Duration: 10 Sept 2012 → 14 Sept 2012

Conference

ConferencePSE 2012
Abbreviated titlePSE2012
Country/TerritoryGermany
CityGarmisch-Partenkirchen
Period10/09/12 → 14/09/12

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