Skip to main navigation Skip to search Skip to main content

Influence of the N2 partial pressure on structure and properties of Zr1-xAlxN thin films

  • Doris Sonnleitner
  • , Jörg Paulitsch
  • , Peter Polcik
  • , Paul Heinz Mayrhofer

Research output: Contribution to conference › Poster › Research › peer-review

Translated title of the contributionInfluence of the N2 partial pressure on structure and properties of Zr1-xAlxN thin films
Original languageEnglish
Publication statusPublished - 2012
EventPSE 2012 - Garmisch-Partenkirchen, Germany
Duration: 10 Sept 2012 → 14 Sept 2012

Conference

ConferencePSE 2012
Abbreviated titlePSE2012
Country/TerritoryGermany
CityGarmisch-Partenkirchen
Period10/09/12 → 14/09/12

Cite this