Influence of the nitrogen content on the structure and properties of MoNbTaVW high entropy alloy thin films

Ao Xia, Robin Dedoncker, Oleksandr Glushko, Megan J. Cordill, Diederik Depla, Robert Franz

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Abstract

The influence of nitrogen incorporation on the chemical composition, structure, mechanical, and electrical properties of refractory (MoNbTaVW) 1−xN x high entropy alloy thin films is investigated. The films were synthesized by two different physical vapor deposition methods, cathodic arc deposition and direct current magnetron sputtering, onto silicon and polyimide substrates. Regardless of the deposition method, a change from body centered cubic to face centered cubic structure was observed with increasing nitrogen content in the film. This structural change was accompanied by an increase in hardness as measured by nanoindentation but also by a material embrittlement as determined from tensile straining tests.

Original languageEnglish
Article number156740
Number of pages11
JournalJournal of alloys and compounds
Volume850.2021
Issue number5 January
DOIs
Publication statusE-pub ahead of print - 20 Aug 2020

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