Influence of varying nitrogen partial pressures on microstructure, mechanical and optical properties of sputtered TiAlON coatings

Nina Schalk; Jules Simonet Fotso; David Holec; Georg Jakopic; Alexander Fian; Velislava Terziyska; Rostislav Daniel; Christian Mitterer

doi:10.1016/j.actamat.2016.08.007

Influence of varying nitrogen partial pressures on microstructure, mechanical and optical properties of sputtered TiAlON coatings

Nina Schalk
, Jules Simonet Fotso
, David Holec
, Georg Jakopic
, Alexander Fian
, Velislava Terziyska
, Rostislav Daniel
, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

9 Citations (Scopus)

Original language	English
Pages (from-to)	26-34
Number of pages	9
Journal	Acta materialia
Issue number	119
DOIs	https://doi.org/10.1016/j.actamat.2016.08.007
Publication status	Published - 2016

Access to Document

10.1016/j.actamat.2016.08.007

Cite this

@article{5eee9fb101de48c088880aeb60861c0d,

title = "Influence of varying nitrogen partial pressures on microstructure, mechanical and optical properties of sputtered TiAlON coatings",

keywords = "TiAlON, Sputtering, XPS, TEM, Ellipsometry",

author = "Nina Schalk and \{Simonet Fotso\}, Jules and David Holec and Georg Jakopic and Alexander Fian and Velislava Terziyska and Rostislav Daniel and Christian Mitterer",

year = "2016",

doi = "10.1016/j.actamat.2016.08.007",

language = "English",

pages = "26--34",

journal = "Acta materialia",

issn = "1359-6454",

publisher = "Acta Materialia Inc",

number = "119",

}

TY - JOUR

T1 - Influence of varying nitrogen partial pressures on microstructure, mechanical and optical properties of sputtered TiAlON coatings

AU - Schalk, Nina

AU - Simonet Fotso, Jules

AU - Holec, David

AU - Jakopic, Georg

AU - Fian, Alexander

AU - Terziyska, Velislava

AU - Daniel, Rostislav

AU - Mitterer, Christian

PY - 2016

Y1 - 2016

KW - TiAlON

KW - Sputtering

KW - XPS

KW - TEM

KW - Ellipsometry

U2 - 10.1016/j.actamat.2016.08.007

DO - 10.1016/j.actamat.2016.08.007

M3 - Article

SN - 1359-6454

SP - 26

EP - 34

JO - Acta materialia

JF - Acta materialia

IS - 119

ER -