Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films

Juergen Lackner; Wolfgang Waldhauser; R. Berghauser; Reinhold Ebner; M. Beutl; G. Jakopic; G. Leising; H. Hutter; M. Rosner; Thomas Schöberl

doi:10.1016/j.surfcoat.2004.04.080

Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films

Juergen Lackner
, Wolfgang Waldhauser
, R. Berghauser
, Reinhold Ebner
, M. Beutl
, G. Jakopic
, G. Leising
, H. Hutter
, M. Rosner
, Thomas Schöberl

Chair of Materials Physics (430)

Research output: Contribution to journal › Article › Research › peer-review

11 Citations (Scopus)

Translated title of the contribution	Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films
Original language	English
Pages (from-to)	225-230
Journal	Surface & coatings technology
Volume	192
DOIs	https://doi.org/10.1016/j.surfcoat.2004.04.080
Publication status	Published - 2005

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10.1016/j.surfcoat.2004.04.080

Cite this

Lackner, J., Waldhauser, W., Berghauser, R., Ebner, R., Beutl, M., Jakopic, G., Leising, G., Hutter, H., Rosner, M., & Schöberl, T. (2005). Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films. Surface & coatings technology, 192, 225-230. https://doi.org/10.1016/j.surfcoat.2004.04.080

@article{7144c205a39745779491840addf274ea,

title = "Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films",

author = "Juergen Lackner and Wolfgang Waldhauser and R. Berghauser and Reinhold Ebner and M. Beutl and G. Jakopic and G. Leising and H. Hutter and M. Rosner and Thomas Sch{\"o}berl",

year = "2005",

doi = "10.1016/j.surfcoat.2004.04.080",

language = "English",

volume = "192",

pages = "225--230",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

Lackner, J, Waldhauser, W, Berghauser, R, Ebner, R, Beutl, M, Jakopic, G, Leising, G, Hutter, H, Rosner, M & Schöberl, T 2005, 'Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films', Surface & coatings technology, vol. 192, pp. 225-230. https://doi.org/10.1016/j.surfcoat.2004.04.080

TY - JOUR

T1 - Influences of the nitrogen content on the morphological, chemical and optical properies of pulsed laser deposited silicon nitride thin films

AU - Lackner, Juergen

AU - Waldhauser, Wolfgang

AU - Berghauser, R.

AU - Ebner, Reinhold

AU - Beutl, M.

AU - Jakopic, G.

AU - Leising, G.

AU - Hutter, H.

AU - Rosner, M.

AU - Schöberl, Thomas

PY - 2005

Y1 - 2005

U2 - 10.1016/j.surfcoat.2004.04.080

DO - 10.1016/j.surfcoat.2004.04.080

M3 - Article

SN - 0257-8972

VL - 192

SP - 225

EP - 230

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -