Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate

U. Vogel, Steffen Oswald, Jürgen Eckert

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@article{0ca72b7de66d4314834f1db9110e53a8,

title = "Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate",

author = "U. Vogel and Steffen Oswald and J{\"u}rgen Eckert",

year = "2017",

month = dec,

doi = "10.1016/j.apsusc.2017.06.312",

language = "English",

volume = "425.2017",

pages = "254--260",

journal = "Applied surface science",

issn = "0169-4332",

publisher = "Elsevier",

number = "15 December",

}

TY - JOUR

T1 - Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate

AU - Vogel, U.

AU - Oswald, Steffen

AU - Eckert, Jürgen

PY - 2017/12

Y1 - 2017/12

U2 - 10.1016/j.apsusc.2017.06.312

DO - 10.1016/j.apsusc.2017.06.312

M3 - Article

SN - 0169-4332

VL - 425.2017

SP - 254

EP - 260

JO - Applied surface science

JF - Applied surface science

IS - 15 December

ER -