Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass

B. Völker, W. Heinz, K. Matoy, R. Roth, J. M. Batke, T. Schöberl, C. Scheu, G. Dehm

Research output: Contribution to journalArticleResearchpeer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)1967-1981
Number of pages15
JournalPhilosophical magazine
Volume95
Issue number16-18
DOIs
Publication statusPublished - 23 Jun 2015

Keywords

  • 4-point bending
  • interface energy release rate
  • W(TI)/BPSG interface

Cite this