Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis

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Translated title of the contribution	Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
Original language	English
Pages (from-to)	211-216
Journal	Computational materials science
Volume	55
DOIs	https://doi.org/10.1016/j.commatsci.2011.11.024
Publication status	Published - 2012

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@article{a6ccb28f34974e898d52b18ca3951fb8,

title = "Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis",

author = "Vipin Chawla and David Holec and Mayrhofer, \{Paul Heinz\}",

year = "2012",

doi = "10.1016/j.commatsci.2011.11.024",

language = "English",

volume = "55",

pages = "211--216",

journal = "Computational materials science",

issn = "0927-0256",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis

AU - Chawla, Vipin

AU - Holec, David

AU - Mayrhofer, Paul Heinz

PY - 2012

Y1 - 2012

U2 - 10.1016/j.commatsci.2011.11.024

DO - 10.1016/j.commatsci.2011.11.024

M3 - Article

SN - 0927-0256

VL - 55

SP - 211

EP - 216

JO - Computational materials science

JF - Computational materials science

ER -