Translated title of the contribution | Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique |
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Original language | English |
Pages (from-to) | 1768-1776 |
Journal | Acta materialia |
Volume | 57 |
Publication status | Published - 2009 |
Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique
S. Massl, W. Thomma, Jozef Keckes, Reinhard Pippan
Research output: Contribution to journal › Article › Research › peer-review
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