Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique

S. Massl, W. Thomma, Jozef Keckes, Reinhard Pippan

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Translated title of the contributionInvestigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique
Original languageEnglish
Pages (from-to)1768-1776
JournalActa materialia
Volume57
Publication statusPublished - 2009

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