Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets

Markus Pohler, Robert Franz, Jürgen Ramm, C. Polzer, Christian Mitterer

Research output: Contribution to conference › Poster › Research › peer-review

Translated title of the contribution	Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets
Original language	English
Publication status	Published - 2010
Event	11th European Vacuum Conference - Salamanca, Spain Duration: 20 Sept 2010 → 24 Sept 2010

Conference	11th European Vacuum Conference
Country/Territory	Spain
City	Salamanca
Period	20/09/10 → 24/09/10

Cite this

@conference{c304ae4274ea437190c305acae55d94c,

title = "Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets",

author = "Markus Pohler and Robert Franz and J{\"u}rgen Ramm and C. Polzer and Christian Mitterer",

year = "2010",

language = "English",

note = "11th European Vacuum Conference ; Conference date: 20-09-2010 Through 24-09-2010",

}