Ion-assisted MBE for misfit-dislocation templates serving ordered growth of SiGe islands

K. Lyutovich, M. Oehme, J. Werner, B. Bahouchi, E. Kasper, Christian Hofer, Christian Teichert

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Translated title of the contributionIon-assisted MBE for misfit-dislocation templates serving ordered growth of SiGe islands
Original languageEnglish
Pages (from-to)20-22
JournalThin solid films
Volume517
DOIs
Publication statusPublished - 2008

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