Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen

Robert Franz, Peter Polcik, A. Anders

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Translated title of the contribution	Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen
Original language	English
Pages (from-to)	1929-1937
Journal	IEEE Transactions on Plasma Science
Volume	41
DOIs	https://doi.org/10.1109/TPS.2013.2254135
Publication status	Published - 2013

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title = "Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen",

author = "Robert Franz and Peter Polcik and A. Anders",

year = "2013",

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language = "English",

volume = "41",

pages = "1929--1937",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers",

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TY - JOUR

T1 - Ion charge state distributions of Al and Cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen and oxygen

AU - Franz, Robert

AU - Polcik, Peter

AU - Anders, A.

PY - 2013

Y1 - 2013

U2 - 10.1109/TPS.2013.2254135

DO - 10.1109/TPS.2013.2254135

M3 - Article

SN - 0093-3813

VL - 41

SP - 1929

EP - 1937

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

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