Original language | English |
---|---|
Pages (from-to) | 354-359 |
Journal | Surface & coatings technology |
DOIs | |
Publication status | Published - 2018 |
Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films
Anna Maria Hofer-Roblyek, Karl-Heinz Pichler, Christian Linke, Robert Franz, Jörg Winkler, Christian Mitterer
Research output: Contribution to journal › Article › Research › peer-review
5
Citations
(Scopus)