Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films

Anna Maria Hofer-Roblyek, Karl-Heinz Pichler, Christian Linke, Robert Franz, Jörg Winkler, Christian Mitterer

Research output: Contribution to conferencePosterResearch

Original languageEnglish
Publication statusPublished - 2018
EventICMCTF - San Diego, United States
Duration: 23 Apr 201827 Apr 2018


Country/TerritoryUnited States
CitySan Diego

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