Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films

Research output: Contribution to conference › Poster › Research

Original language	English
Publication status	Published - 2018
Event	ICMCTF - San Diego, United States Duration: 23 Apr 2018 → 27 Apr 2018

Cite this

@conference{bbdf566ac1f348cc9b9af0d855cf9242,

title = "Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited films",

author = "Hofer-Roblyek, \{Anna Maria\} and Karl-Heinz Pichler and Christian Linke and Robert Franz and J{\"o}rg Winkler and Christian Mitterer",

year = "2018",

language = "English",

note = "ICMCTF ; Conference date: 23-04-2018 Through 27-04-2018",

}