Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films

Research output: Contribution to journal › Article › Research › peer-review

5 Citations (Scopus)

Original language	English
Pages (from-to)	354-359
Journal	Surface & coatings technology
DOIs	https://doi.org/10.1016/j.surfcoat.2018.07.095
Publication status	Published - 2018

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@article{6f7def7645f142548374cfa25c060f8e,

title = "Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films",

author = "Hofer-Roblyek, \{Anna Maria\} and Karl-Heinz Pichler and Christian Linke and Robert Franz and J{\"o}rg Winkler and Christian Mitterer",

year = "2018",

doi = "10.1016/j.surfcoat.2018.07.095",

language = "English",

pages = "354--359",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films

AU - Hofer-Roblyek, Anna Maria

AU - Pichler, Karl-Heinz

AU - Linke, Christian

AU - Franz, Robert

AU - Winkler, Jörg

AU - Mitterer, Christian

PY - 2018

Y1 - 2018

U2 - 10.1016/j.surfcoat.2018.07.095

DO - 10.1016/j.surfcoat.2018.07.095

M3 - Article

SN - 0257-8972

SP - 354

EP - 359

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -