@article{b7ba12d3fd4641cd874aa6ba9e444926,
title = "Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass",
keywords = "4-point-bending, Interface, Interface energy release rate, Ti enrichment at interface, W-based metallization",
author = "B. V{\"o}lker and W. Heinz and K. Matoy and R. Roth and Batke, {J. M.} and T. Sch{\"o}berl and Cordill, {M. J.} and G. Dehm",
year = "2015",
doi = "10.1016/j.tsf.2015.03.047",
language = "English",
volume = "583",
pages = "170--176",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
number = "1",
}