Mechanical Properties of Atomic-Layer-Deposited Al2O3/Y2O3 Nanolaminate Films on Aluminum toward Protective Coatings

Janne-Petteri Niemelä, Barbara Putz, Gustavo Mata-Osoro, Carlos Guerra-Nuñez, Remo N. Widmer, Nadia Rohbeck, Thomas E. J. Edwards, Max Döbeli, Krzysztof Maćkosz, Aleksandra Szkudlarek, Yury Kuzminykh, Xavier Maeder, Johann Michler, Bernhard Andreaus, Ivo Utke

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)6285-6296
JournalACS Applied Nano Materials
DOIs
Publication statusPublished - 27 May 2022

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