Mechanical properties of homogeneous and nitrogen graded TiN thin films

Felipe C Silva, Matheus A Tunes, Julio C Sagás, Luis C Fontana, Nelson B de Lima, Cláudio G Schön

Research output: Contribution to journalArticleResearchpeer-review

3 Citations (Scopus)
Original languageEnglish
Article number138268
Pages (from-to)138268
Number of pages1
JournalThin solid films
Publication statusPublished - 30 Sept 2020


  • Ceramics
  • Characterization
  • Coatings
  • Fracture behavior
  • Stress measurements
  • X-ray analysis

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