@article{70841067006e42b2931b55ccaace095c,
title = "Mechanical properties of homogeneous and nitrogen graded TiN thin films",
keywords = "Ceramics, Characterization, Coatings, Fracture behavior, Stress measurements, X-ray analysis",
author = "Silva, \{Felipe C\} and Tunes, \{Matheus A\} and Sag{\'a}s, \{Julio C\} and Fontana, \{Luis C\} and \{de Lima\}, \{Nelson B\} and Sch{\"o}n, \{Cl{\'a}udio G\}",
year = "2020",
month = sep,
day = "30",
doi = "10.1016/j.tsf.2020.138268",
language = "English",
volume = "710",
pages = "138268",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
}