Mechanical properties of micro-sized copper bending beams machined by the focused ion beam technique

Christian Motz, Thomas Schöberl, Reinhard Pippan

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248 Citations (Scopus)
Translated title of the contributionMechanical properties of micro-sized copper bending beams machined by the focused ion beam technique
Original languageEnglish
Pages (from-to)4269-4279
JournalActa materialia
Volume53
DOIs
Publication statusPublished - 2005

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