Original language | English |
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Pages (from-to) | 49-54 |
Number of pages | 6 |
Journal | IFAC-PapersOnLine |
Volume | 52 |
Issue number | 15 |
DOIs | |
Publication status | Published - Sept 2019 |
Externally published | Yes |
Event | 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Austria Duration: 4 Sept 2019 → 6 Sept 2019 |
Bibliographical note
Publisher Copyright:© 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.
Keywords
- Characterization
- MEMS mirror
- Metrology
- Microelectromechanical systems (MEMS)
- Uncertainty analysis