MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors

Yoo Han Woong, David Brunner, Thomas Thurner, Georg Schitter

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Pages (from-to)49-54
Number of pages6
Issue number15
Publication statusPublished - Sept 2019
Externally publishedYes
Event8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Austria
Duration: 4 Sept 20196 Sept 2019

Bibliographical note

Publisher Copyright:
© 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.


  • Characterization
  • MEMS mirror
  • Metrology
  • Microelectromechanical systems (MEMS)
  • Uncertainty analysis

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