MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors

Yoo Han Woong; David Brunner; Thomas Thurner; Georg Schitter

doi:10.1016/j.ifacol.2019.11.648

MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors

Yoo Han Woong, David Brunner, Thomas Thurner, Georg Schitter

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	49-54
Number of pages	6
Journal	IFAC-PapersOnLine
Volume	52
Issue number	15
DOIs	https://doi.org/10.1016/j.ifacol.2019.11.648
Publication status	Published - Sept 2019
Externally published	Yes
Event	8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Austria Duration: 4 Sept 2019 → 6 Sept 2019

Bibliographical note

Publisher Copyright:
© 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.

Keywords

Characterization
MEMS mirror
Metrology
Microelectromechanical systems (MEMS)
Uncertainty analysis

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10.1016/j.ifacol.2019.11.648

Cite this

@article{6bbf33aad95f4f6cb8d27939d0aa25ca,

title = "MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors",

keywords = "Characterization, MEMS mirror, Metrology, Microelectromechanical systems (MEMS), Uncertainty analysis",

author = "{Han Woong}, Yoo and David Brunner and Thomas Thurner and Georg Schitter",

note = "Publisher Copyright: {\textcopyright} 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.; 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 ; Conference date: 04-09-2019 Through 06-09-2019",

year = "2019",

month = sep,

doi = "10.1016/j.ifacol.2019.11.648",

language = "English",

volume = "52",

pages = "49--54",

journal = "IFAC-PapersOnLine",

issn = "2405-8963",

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TY - JOUR

T1 - MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors

AU - Han Woong, Yoo

AU - Brunner, David

AU - Thurner, Thomas

AU - Schitter, Georg

PY - 2019/9

Y1 - 2019/9

KW - Characterization

KW - MEMS mirror

KW - Metrology

KW - Microelectromechanical systems (MEMS)

KW - Uncertainty analysis

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U2 - 10.1016/j.ifacol.2019.11.648

DO - 10.1016/j.ifacol.2019.11.648

M3 - Conference article

AN - SCOPUS:85077498382

SN - 2405-8963

VL - 52

SP - 49

EP - 54

JO - IFAC-PapersOnLine

JF - IFAC-PapersOnLine

IS - 15

T2 - 8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019

Y2 - 4 September 2019 through 6 September 2019

ER -

MEMS test bench and its uncertainty analysis for evaluation of MEMS mirrors

Bibliographical note

Keywords

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