| Translated title of the contribution | Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers |
|---|---|
| Original language | English |
| Pages (from-to) | 5796-5801 |
| Journal | Thin solid films |
| Volume | 518 |
| Publication status | Published - 2010 |
Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers
Kurt Matoy, H. Schönherr, Thomas Detzel, Gerhard Dehm
Research output: Contribution to journal › Article › Research › peer-review
24
Citations
(Scopus)