Microstructure and physical properties of sputter-deposited Cu-Mo thin films

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@article{c4fd7fce85b84f9f90daf3fa552a04ea,

title = "Microstructure and physical properties of sputter-deposited Cu-Mo thin films",

author = "Imane Souli and Velislava Terziyska and Johannes Zechner and Christian Mitterer",

year = "2018",

doi = "10.1016/j.tsf.2018.03.039",

language = "English",

pages = "301--308",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}