Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

Nina Schalk; Jules Simonet Fotso; David Holec; Alexander Fian; Georg Jakopic; Velislava Terziyska; Rostislav Daniel; Christian Mitterer

doi:doi:10.1088/0022-3727/49/2/025307

Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

Nina Schalk
, Jules Simonet Fotso
, David Holec
, Alexander Fian
, Georg Jakopic
, Velislava Terziyska
, Rostislav Daniel
, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	1-9
Number of pages	9
Journal	Journal of physics / D, Applied physics
Volume	49
DOIs	https://doi.org/doi:10.1088/0022-3727/49/2/025307
Publication status	Published - 2016

Access to Document

doi:10.1088/0022-3727/49/2/025307

Cite this

@article{4593fc62cda94ea58dc52519fb24b154,

title = "Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures",

author = "Nina Schalk and \{Simonet Fotso\}, Jules and David Holec and Alexander Fian and Georg Jakopic and Velislava Terziyska and Rostislav Daniel and Christian Mitterer",

year = "2016",

doi = "doi:10.1088/0022-3727/49/2/025307",

language = "English",

volume = "49",

pages = "1--9",

journal = "Journal of physics / D, Applied physics",

issn = "0022-3727",

publisher = "Institute of Physics",

}

TY - JOUR

T1 - Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

AU - Schalk, Nina

AU - Simonet Fotso, Jules

AU - Holec, David

AU - Fian, Alexander

AU - Jakopic, Georg

AU - Terziyska, Velislava

AU - Daniel, Rostislav

AU - Mitterer, Christian

PY - 2016

Y1 - 2016

U2 - doi:10.1088/0022-3727/49/2/025307

DO - doi:10.1088/0022-3727/49/2/025307

M3 - Article

SN - 0022-3727

VL - 49

SP - 1

EP - 9

JO - Journal of physics / D, Applied physics

JF - Journal of physics / D, Applied physics

ER -