Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing

Matt B. Lowry, Daniel Kiener, B. B. Le Blanc, Claire Chisholm, Jeff N. Florando, J. W. Jr Morris, Andrew M. Minor

Research output: Contribution to journalArticleResearchpeer-review

Translated title of the contributionMitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing
Original languageEnglish
Pages (from-to)1748-1749
JournalMicroscopy and microanalysis
Volume16
DOIs
Publication statusPublished - 2010

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