Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing

Matt B. Lowry; Daniel Kiener; B. B. Le Blanc; Claire Chisholm; Jeff N. Florando; J. W. Jr Morris; Andrew M. Minor

doi:10.1017/S1431927610061957

Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing

Matt B. Lowry
, Daniel Kiener
, B. B. Le Blanc
, Claire Chisholm
, Jeff N. Florando
, J. W. Jr Morris
, Andrew M. Minor

Chair of Materials Physics (430)

Research output: Contribution to journal › Article › Research › peer-review

Translated title of the contribution	Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing
Original language	English
Pages (from-to)	1748-1749
Journal	Microscopy and microanalysis
Volume	16
DOIs	https://doi.org/10.1017/S1431927610061957
Publication status	Published - 2010

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10.1017/S1431927610061957

Cite this

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title = "Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing",

author = "Lowry, \{Matt B.\} and Daniel Kiener and \{Le Blanc\}, \{B. B.\} and Claire Chisholm and Florando, \{Jeff N.\} and Morris, \{J. W. Jr\} and Minor, \{Andrew M.\}",

year = "2010",

doi = "10.1017/S1431927610061957",

language = "English",

volume = "16",

pages = "1748--1749",

journal = "Microscopy and microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press, Gro{\ss}britannien",

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T1 - Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing

AU - Lowry, Matt B.

AU - Kiener, Daniel

AU - Le Blanc, B. B.

AU - Chisholm, Claire

AU - Florando, Jeff N.

AU - Morris, J. W. Jr

AU - Minor, Andrew M.

PY - 2010

Y1 - 2010

U2 - 10.1017/S1431927610061957

DO - 10.1017/S1431927610061957

M3 - Article

SN - 1431-9276

VL - 16

SP - 1748

EP - 1749

JO - Microscopy and microanalysis

JF - Microscopy and microanalysis

ER -