| Translated title of the contribution | Molybdenum corrosion in PVD processes |
|---|---|
| Original language | English |
| Title of host publication | Molybdenum corrosion in PVD processes |
| Pages | 1-13 |
| Publication status | Published - 2013 |
Molybdenum corrosion in PVD processes
Christoph Holzer, Clemens Vichytil, Gregor Mori, Christian Linke
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution