Molybdenum corrosion in PVD processes

  • Christoph Holzer
  • , Clemens Vichytil
  • , Gregor Mori
  • , Christian Linke

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Translated title of the contributionMolybdenum corrosion in PVD processes
Original languageEnglish
Title of host publicationMolybdenum corrosion in PVD processes
Pages1-13
Publication statusPublished - 2013

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