| Original language | English |
|---|---|
| Patent number | SI2784586 (T1) |
| IPC | G03F 7/ 00 C I |
| Priority date | 27/03/13 |
| Filing date | 30/11/15 |
| Publication status | Published - 30 Nov 2015 |
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Research output: Patent
| Original language | English |
|---|---|
| Patent number | SI2784586 (T1) |
| IPC | G03F 7/ 00 C I |
| Priority date | 27/03/13 |
| Filing date | 30/11/15 |
| Publication status | Published - 30 Nov 2015 |