Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

Andrei Andreev, Christian Teichert

Research output: Contribution to conferencePosterResearchpeer-review

Translated title of the contributionNano-scale characterization of high-k dielectric materials by conducting atomic force microscopy
Original languageEnglish
Publication statusPublished - 2005
Event52nd Annual International Symposium of the American Vacuum Society (AVS) - Boston, United States
Duration: 31 Oct 20054 Nov 2005

Conference

Conference52nd Annual International Symposium of the American Vacuum Society (AVS)
Country/TerritoryUnited States
CityBoston
Period31/10/054/11/05

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