Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

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Translated title of the contribution	Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy
Original language	English
Publication status	Published - 2005
Event	52nd Annual International Symposium of the American Vacuum Society (AVS) - Boston, United States Duration: 31 Oct 2005 → 4 Nov 2005

Conference	52nd Annual International Symposium of the American Vacuum Society (AVS)
Country/Territory	United States
City	Boston
Period	31/10/05 → 4/11/05

Cite this

@conference{e9962f0170e846deb811226cbf26c6fe,

title = "Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy",

author = "Andrei Andreev and Christian Teichert",

year = "2005",

language = "English",

note = "52nd Annual International Symposium of the American Vacuum Society (AVS) ; Conference date: 31-10-2005 Through 04-11-2005",

}