Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

Sascha Kremmer; Harald Wurmbauer; Andrei Andreev; Christian Teichert; G. Tallarida; S. Spiga; C. Wiemer; M. Fanciulli

Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

Sascha Kremmer
, Harald Wurmbauer
, Andrei Andreev
, Christian Teichert
, G. Tallarida
, S. Spiga
, C. Wiemer
, M. Fanciulli

Chair of Physics (460)

Research output: Contribution to conference › Poster › Research › peer-review

Translated title of the contribution	Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy
Original language	English
Publication status	Published - 2006
Event	14th International Winterschool on New Developments in Solid State Physics - Mauterndorf, Austria Duration: 13 Feb 2006 → 17 Feb 2006

Conference

Conference	14th International Winterschool on New Developments in Solid State Physics
Country/Territory	Austria
City	Mauterndorf
Period	13/02/06 → 17/02/06

Cite this

@conference{13c76756048d46f5a6d9311620cea3a1,

title = "Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy",

author = "Sascha Kremmer and Harald Wurmbauer and Andrei Andreev and Christian Teichert and G. Tallarida and S. Spiga and C. Wiemer and M. Fanciulli",

year = "2006",

language = "English",

note = "14th International Winterschool on New Developments in Solid State Physics ; Conference date: 13-02-2006 Through 17-02-2006",

}

Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy. / Kremmer, Sascha; Wurmbauer, Harald; Andreev, Andrei et al.
2006. Poster session presented at 14th International Winterschool on New Developments in Solid State Physics, Mauterndorf, Austria.

Research output: Contribution to conference › Poster › Research › peer-review

TY - CONF

T1 - Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

AU - Kremmer, Sascha

AU - Wurmbauer, Harald

AU - Andreev, Andrei

AU - Teichert, Christian

AU - Tallarida, G.

AU - Spiga, S.

AU - Wiemer, C.

AU - Fanciulli, M.

PY - 2006

Y1 - 2006

M3 - Poster

T2 - 14th International Winterschool on New Developments in Solid State Physics

Y2 - 13 February 2006 through 17 February 2006

ER -