Nanoscale morphological and electrical homogeneity of HfO2 and ZrO2 thin films

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Translated title of the contribution	Nanoscale morphological and electrical homogeneity of HfO2 and ZrO2 thin films
Original language	English
Journal	Journal of applied physics
Volume	97
DOIs	https://doi.org/10.1063/1.1885166
Publication status	Published - 2005

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@article{a06b872326bf445b8f387841a2fb6cae,

title = "Nanoscale morphological and electrical homogeneity of HfO2 and ZrO2 thin films",

author = "Christian Teichert and Sascha Kremmer",

year = "2005",

doi = "10.1063/1.1885166",

language = "English",

volume = "97",

journal = "Journal of applied physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

}