Nanoscale morphological and electrical homogeneity of HfO2 and ZrO2 thin films

Research output: Contribution to journal › Article › Research › peer-review

46 Citations (Scopus)

Translated title of the contribution	Nanoscale morphological and electrical homogeneity of HfO2 and ZrO2 thin films
Original language	English
Journal	Journal of applied physics
Volume	97
DOIs	https://doi.org/10.1063/1.1885166
Publication status	Published - 2005

Access to Document

@article{a06b872326bf445b8f387841a2fb6cae,

title = "Nanoscale morphological and electrical homogeneity of HfO2 and ZrO2 thin films",

author = "Christian Teichert and Sascha Kremmer",

year = "2005",

doi = "10.1063/1.1885166",

language = "English",

volume = "97",

journal = "Journal of applied physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

}