Nanostructure formation on ion-eroded SiGe film surfaces

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Translated title of the contribution	Nanostructure formation on ion-eroded SiGe film surfaces
Original language	English
Pages (from-to)	281-291
Journal	Superlattices and microstructures
Volume	36
DOIs	https://doi.org/10.1016/j.spmi.2004.08.003
Publication status	Published - 2004

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@article{51dec1aeb6df4974a1147dfc88c74861,

title = "Nanostructure formation on ion-eroded SiGe film surfaces",

author = "Christian Hofer and Christian Teichert and Erich Kasper",

year = "2004",

doi = "10.1016/j.spmi.2004.08.003",

language = "English",

volume = "36",

pages = "281--291",

journal = "Superlattices and microstructures",

issn = "0749-6036",

publisher = "Academic Press Inc.",

}