Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets

Julia Pachlhofer; Aitana Tarazaga Martin-Luengo; Robert Franz; Enrico Franzke; Harald Köstenbauer; Jörg Winkler; Alberta Bonanni; Silvia Mitterer; Christian Mitterer

doi:10.1016/j.surfcoat.2017.07.083

Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoO_x targets

Julia Pachlhofer, Aitana Tarazaga Martin-Luengo, Robert Franz, Enrico Franzke, Harald Köstenbauer, Jörg Winkler, Alberta Bonanni, Silvia Mitterer, Christian Mitterer

Chair of Functional Materials and Materials Systems (425)

Research output: Contribution to journal › Article › Research › peer-review

5 Citations (Scopus)

Original language	English
Pages (from-to)	80-85
Number of pages	6
Journal	Surface & coatings technology
Volume	332.2017
Issue number	25 December
DOIs	https://doi.org/10.1016/j.surfcoat.2017.07.083
Publication status	E-pub ahead of print - 18 Sept 2017

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10.1016/j.surfcoat.2017.07.083

Cite this

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title = "Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets",

author = "Julia Pachlhofer and Martin-Luengo, {Aitana Tarazaga} and Robert Franz and Enrico Franzke and Harald K{\"o}stenbauer and J{\"o}rg Winkler and Alberta Bonanni and Silvia Mitterer and Christian Mitterer",

year = "2017",

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doi = "10.1016/j.surfcoat.2017.07.083",

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pages = "80--85",

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T1 - Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets

AU - Pachlhofer, Julia

AU - Martin-Luengo, Aitana Tarazaga

AU - Franz, Robert

AU - Franzke, Enrico

AU - Köstenbauer, Harald

AU - Winkler, Jörg

AU - Bonanni, Alberta

AU - Mitterer, Silvia

AU - Mitterer, Christian

PY - 2017/9/18

Y1 - 2017/9/18

U2 - 10.1016/j.surfcoat.2017.07.083

DO - 10.1016/j.surfcoat.2017.07.083

M3 - Article

SN - 0257-8972

VL - 332.2017

SP - 80

EP - 85

JO - Surface & coatings technology

JF - Surface & coatings technology

IS - 25 December

ER -