@article{c2f6f608389843ccb6b9f6c34b0b9082,
title = "Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets",
author = "Julia Pachlhofer and Martin-Luengo, \{Aitana Tarazaga\} and Robert Franz and Enrico Franzke and Harald K{\"o}stenbauer and J{\"o}rg Winkler and Alberta Bonanni and Silvia Mitterer and Christian Mitterer",
year = "2017",
month = sep,
day = "18",
doi = "10.1016/j.surfcoat.2017.07.083",
language = "English",
volume = "332.2017",
pages = "80--85",
journal = "Surface \& coatings technology",
issn = "0257-8972",
publisher = "Elsevier B.V.",
number = "25 December",
}