Novel methods for the site specific preparation of micromechanical structures

Stefan Wurster, Ruth Treml, Reinhard Fritz, Marlene W Kapp, Eva Langs, Markus Alfreider, Christian Ruhs, Peter J. Imrich, Gabriele Felber, Daniel Kiener

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Translated title of the contributionNovel methods for the site specific preparation of micromechanical structures
Original languageEnglish
Title of host publicationFortschritte in der Metallographie
Pages27-36
Publication statusPublished - 2014

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